MANUFACTURING METHOD OF TEMPERATURE SENSOR ARRAY ON A 3-DIMENTIONAL CURVED SURFACE

摘要

PURPOSE: A method for manufacturing a temperature sensor array on a three-dimensional curved substrate is provided to measure the temperature distribution of a system, such as a refrigerator and a computer, at a high-temperature condition. CONSTITUTION: A method for manufacturing a temperature sensor array on a three-dimensional curved substrate is as follows. A photosensitive film is spread on a planar substrate(S110). Ultraviolet rays are exposed to the photosensitive film through an optical mask having sensor shaped patterns(S120). The photosensitive film exposed to the ultraviolet rays is detached from the planar substrate(S130). An insulating layer is spread on a three-dimensional curved substrate(S140). A metal layer is evaporated on the insulating layer(S170). The detached photosensitive film is attached on the metal layer(S150).