METHOD FOR MANUFACTURING PATTERNED ELECTRON SOURCE, AND PATTERNED ELECTRON SOURCE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a patterned electron source, by which a fine pattern can be easily formed, and a patterned electron source.

SOLUTION: The method for manufacturing a patterned electron source includes the steps of: forming a first field emission part 1 by forming a first pattern 5 on a first substrate 2 having a conductive surface and then providing one or more first emitters 10 along the first pattern 5; and forming a second field emission part 15 by irradiating an electron beam from the first emitters 10 to form a second pattern 18 on a second substrate 16 having a conductive surface and then providing one or more second emitters along the second pattern 18. A patterned electron source 25 is manufactured by forming a plurality of the second field emission parts 15.

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