| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pulsation reduction device that stably and surely reduces pulsation due to a pump by maintaining a liquid level in a tank within a certain range even if a liquid level is changed in a tank retaining a liquid to be circulated in a base by using the pump, and an inspection device. <P>SOLUTION: A pulsation reduction device 16 includes a second tank 16A connected to a circulation piping 12 and retains a coolant by leaving a space, first and second liquid level sensors 16B and 16C for detecting the liquid level of the coolant in the second tank 16A, and an air control device 16D electrically connected to the first and second liquid level sensors 16B and 16C and operates based on detection signals from the sensors 16B and 16C. A gas such as air that fills the space in the second tank 16A serves as a buffer for reducing the pulsation occurring when the coolant is ejected by a pump 13. <P>COPYRIGHT: (C)2012,JPO&INPIT |
