| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for providing accurate mass flow controller flow-rate data for a non-manufacturing adjustment gas. <P>SOLUTION: A mass flow controller may be operated at a set point greater than 50%. Data may be recorded in a mass flow controller memory. The set point may then be changed to 0%. The recorded data may then be analyzed and one or more non-manufacturing adjustment gas correction algorithm parameters may be calculated. The one or more non-manufacturing adjustment gas correction algorithm parameters may be stored in the mass flow controller memory and subsequently used in at least one future mass flow controller operation involving the non-manufacturing adjustment gas. <P>COPYRIGHT: (C)2012,JPO&INPIT |
