| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a conveyance device equipped with two conveyance mechanisms for alternately conveying substrates, and which has excellent height precision in conveying the substrates and also has high parallelism of the substrates. <P>SOLUTION: A conveyance device 2 comprises: a conveyance path 10; slider chuck guides 31 and 32 extending in a y-axis direction; and slider chucks 41 and 42 which move freely along the slider chuck guides 31 and 32. Each of the slider chucks 41 and 42 has, on its upper end face, an adhesion surface that adheres to a substrate lower face and a jetting port from which air is jetted toward the substrate lower face. Each of the slider chucks moves the substrate in a y-axis positive direction while being adhered to the substrate lower face, and returns, with the adhesion released, to a y-axis negative direction after conveying the substrate. Upon returning, air is jetted toward the lower face of a substrate 62 to levitate the substrate 62 while the slider chuck 41 is passing over the substrate 62, for example. <P>COPYRIGHT: (C)2012,JPO&INPIT |
