| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of correctly measuring a center or a center-to-center distance of holes with extremely small inner diameters. <P>SOLUTION: In a method of measuring a center or a center-to-center distance of holes, a plurality of optical fibers for hole insertion 20 are provided, where it comprises: a small diameter unit 24 having an external diameter larger than an external diameter of a core 2002 but smaller than an external diameter of a clad 2004, with a light diffusing unit 30 for diffusing light formed at the tip of the small diameter unit; and an insertion unit 28 composed of a metal film 26A that is formed from a periphery of the small diameter unit 24 to a periphery of a coat 2006. The center-to-center distance of holes 12 is calculated by inserting the insertion unit 28 into one end part of the holes 12 to be measured, supplying light to an optical fiber 22 and, at the other end part of the holes 12, processing the light image diffused by the light diffusing unit 30 in the holes 12. <P>COPYRIGHT: (C)2012,JPO&INPIT |
