| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection device and an inspection method that precisely detect a shape defect part of an electrode pattern formed on a glass plate through a small number of times of measurement, and a method of manufacturing a panel for image display using the same. <P>SOLUTION: The inspection device includes: a first projection device 101 which irradiates a reverse surface of the glass plate (a body 106 to be inspected) having an electrode pattern with light; a second projection device 109 which irradiates a top surface of the glass plate with light from an oblique direction; an imaging device 102 which images the top surface of the glass plate; a lens system 103 which makes the imaging device 102 image the top surface of the glass plate; and a processor which processes the image of the top surface of the glass plate imaged by the imaging device 102 to detect the shape defect part of the electrode pattern. Illumination conditions by the first and second projection devices 101, 109 are so set that an image of an internal air bubble formed in the glass plate, an image of the glass plate, and an image of the electrode pattern are higher in luminance in this order. <P>COPYRIGHT: (C)2012,JPO&INPIT |
