| 摘要 |
<P>PROBLEM TO BE SOLVED: To manufacture in a good yield a nucleic acid analysis device that analyzes nucleic acid in a sample through light emission measurement, and has a metal layer having a gap. <P>SOLUTION: A first metal layer or insulating layer 502 is formed on a support base 501, and a metal film 514 to form a second metal layer is formed and patterned. A second metal layer 503 which has a gap is formed by laminating metal to form the second metal layer in a direction inclined to a normal direction of a surface of the support base 501 using the patterned metal film 514 to form the second metal layer as a mask. The second metal layer 503 of the nucleic acid analysis device has a step across a gap 504 where a probe is fixed, thereby improving efficiency of nucleic acid analysis. <P>COPYRIGHT: (C)2012,JPO&INPIT |
