| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a measurement device that carries out a high-precision shape measurement by performing temperature control over a body to be detected. <P>SOLUTION: A measurement device that measures a shape of a body to be detected comprises: detection means of collecting shape information on the body to be detected, antifouling gas flow generation means of generating a gas flow for at least preventing the detection means from being contaminated, temperature measurement means of measuring the temperature of the body to be measured, gas flow generation means of generating a gas flow for adjusting the temperature of the body to be detected, and temperature control means of controlling the gas flow generation means based upon information from the temperature measurement means so as to hold the body to be detected within a predetermined temperature range. <P>COPYRIGHT: (C)2012,JPO&INPIT |
