AUTOFOCUS MECHANISM AND OPTICAL PROCESSING DEVICE PROVIDED WITH THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an autofocus mechanism and an optical processing device provided with the same which are capable of preventing an erroneous detection even when laser light in a near-infrared region is used.

SOLUTION: An autofocus mechanism which comprises: a light source 10; a sample stage transfer section 3 to move a sample along an optical axis; autofocus means to perform focusing of an object lens by moving the sample. The autofocus means has: light receiving elements to receive reflected light from a surface of the sample; a determination value calculation program 61a to calculate a determination value by a prescribed arithmetic operation based on output values output by respective light receiving elements when the sample is being moved; a focus position detection program 61b to detect a position where the calculated determination value reaches a prescribed threshold as a laser focus point; and a threshold setting program 61c to change settings of threshold for the determination value calculated by the determination value calculation program 61a.

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