| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electric characteristic inspection apparatus and method capable of applying a uniform load to an object to be inspected and shortening an inspection time. <P>SOLUTION: The electric characteristic inspection apparatus includes a pressing mechanism for pressing the object to be inspected against an inspection apparatus with equal pressing force at a plurality of points and a conveying mechanism for sucking the object to be inspected in a direction where it is pressed by the pressing mechanism and holding and conveying it. <P>COPYRIGHT: (C)2012,JPO&INPIT |
