发明名称 RESIST COMPOSITION, RESIST PATTERN FORMATION METHOD, POLYMERIC COMPOUND, AND COMPOUND
摘要 Disclosed are: a resist composition and a resist pattern formation method, both of which enable the formation of a fine resist pattern having good lithographic properties; a novel polymeric compound which is useful for the resist composition; and a compound which is useful as a monomer for the polymeric compound. The resist composition contains a polymeric compound (A) which has a constituent unit (a0) represented by general formula (a0). In the formula (a0), A represents an anion represented by general formula (1) or (2).
申请公布号 WO2011158817(A1) 申请公布日期 2011.12.22
申请号 WO2011JP63560 申请日期 2011.06.14
申请人 TOKYO OHKA KOGYO CO., LTD.;KAWAUE AKIYA;DOHTANI KAZUSHIGE;UTSUMI YOSHIYUKI;IWASHITA JUN;KONNO KENRI;SHIONO DAIJU;TAKAKI DAICHI 发明人 KAWAUE AKIYA;DOHTANI KAZUSHIGE;UTSUMI YOSHIYUKI;IWASHITA JUN;KONNO KENRI;SHIONO DAIJU;TAKAKI DAICHI
分类号 G03F7/039;C07C381/12;C08F20/38;G03F7/004;H01L21/027 主分类号 G03F7/039
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