发明名称 |
RESIST COMPOSITION, RESIST PATTERN FORMATION METHOD, POLYMERIC COMPOUND, AND COMPOUND |
摘要 |
Disclosed are: a resist composition and a resist pattern formation method, both of which enable the formation of a fine resist pattern having good lithographic properties; a novel polymeric compound which is useful for the resist composition; and a compound which is useful as a monomer for the polymeric compound. The resist composition contains a polymeric compound (A) which has a constituent unit (a0) represented by general formula (a0). In the formula (a0), A represents an anion represented by general formula (1) or (2). |
申请公布号 |
WO2011158817(A1) |
申请公布日期 |
2011.12.22 |
申请号 |
WO2011JP63560 |
申请日期 |
2011.06.14 |
申请人 |
TOKYO OHKA KOGYO CO., LTD.;KAWAUE AKIYA;DOHTANI KAZUSHIGE;UTSUMI YOSHIYUKI;IWASHITA JUN;KONNO KENRI;SHIONO DAIJU;TAKAKI DAICHI |
发明人 |
KAWAUE AKIYA;DOHTANI KAZUSHIGE;UTSUMI YOSHIYUKI;IWASHITA JUN;KONNO KENRI;SHIONO DAIJU;TAKAKI DAICHI |
分类号 |
G03F7/039;C07C381/12;C08F20/38;G03F7/004;H01L21/027 |
主分类号 |
G03F7/039 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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