发明名称 A SPLICING TECHNIQUE FOR FIXED ABRASIVES USED IN CHEMICAL MECHANICAL PLANARIZATION
摘要 An abrasive article includes a support pad, a first abrasive element, a second abrasive element and a fixation mechanism. The support pad has a first major surface, a second major surface, a first edge, a second edge and a channel. The channel is formed within the first major surface and extends from the first edge to the second edge. The first and second abrasive elements are each positionable over a portion of the support pad. The fixation mechanism is positioned within the channel ad secures an edge of the first abrasive element and an edge of the second abrasive element to the support pad.
申请公布号 WO2011159536(A2) 申请公布日期 2011.12.22
申请号 WO2011US39618 申请日期 2011.06.08
申请人 3M INNOVATIVE PROPERTIES COMPANY 发明人 GAGLIARDI, JOHN J.,
分类号 H01L21/304 主分类号 H01L21/304
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