| 摘要 |
<p>An optical path switch and an optical router are provided. The optical path switch comprises an input optical path (100), two output optical paths (201, 202), and an optical path switching element (300). The optical path switching element selectively routes the beam from the input optical path to one of the output optical paths. The optical path switching element comprises a semiconductor substrate (301), an inter-level dielectric layer (307) on the surface of the semiconductor substrate, a cavity (302) disposed in the inter-level dielectric layer, and an elastic light guiding plate (306) disposed in the cavity. One end of the cavity is connected with the input optical path, and the other end is separated into an upper cavity (304) and a lower cavity (305) by an isolating layer (303), wherein the upper cavity and the lower cavity are connected with the two output optical paths, respectively. The elastic light guiding plate made of reflecting material comprises a fixed end connected with the isolating layer, and a free end suspended in the cavity and towards the input optical path. The free end can move between the top and the bottom of the cavity.</p> |
