发明名称 DEVICE FOR CALIBRATING AN OPTICAL SCANNER, METHOD OF PRODUCING THE SAME AND METHOD FOR CALIBRATING AN OPTICAL SCANNER USING THE SAME
摘要 PURPOSE: An optical scanner revising element, a manufacturing method thereof, and a method for revising the optical scanner by using the same are provided to variously measure pixels of an optical scanner and to form various patterns. CONSTITUTION: An optical scanner revising element comprises a substrate(10) and a pattern(20). The same pattern is located on the top of the substrate. The same pattern is made of photoresist. The photoresist is the color photoresist. The substrate is made of one of silicon, quartz, glass and plastic materials. Multiple patterns are arranged on the top of the substrate as an array shape. A marginal region(27) is included between multiple patterns. Photoresist comprises a photoresist bonding agent, and pigment or dye.
申请公布号 KR20110136299(A) 申请公布日期 2011.12.21
申请号 KR20100056191 申请日期 2010.06.14
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHI, SUNG MIN;JUNG, SUNG OUK;KIM, MYOUNG SOON;SHIM, JEO YOUNG;JEON, TAE HAN
分类号 G01N21/93;G01N33/483;H01L21/02 主分类号 G01N21/93
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