发明名称 PROCESS FOR PRODUCING MULTILAYERED GAS-BARRIER FILM
摘要 <p>Provided are a method for producing a film, which is satisfactory in productivity, exhibits high gas-barrier property immediately after production, and has excellent adhesive strength between constituent layers while maintaining the excellent gas-barrier property, and a gas-barrier film, which is obtained by the method. The method for producing a gas-barrier film includes the steps of: (1) forming an inorganic thin film by a vacuum deposition method on at least one surface of a base film; (2) forming a thin film by a plasma CVD method on the inorganic thin film formed in the step (1); and (3) forming an inorganic thin film by the vacuum deposition method on the thin film formed in the step (2), in which each of the steps (1) and (3), and the step (2) are sequentially carried out at a pressure of 1×10 -7 to 1 Pa, and at a pressure of 1×10 -3 to 1×10 2 Pa, respectively.</p>
申请公布号 EP2397574(A1) 申请公布日期 2011.12.21
申请号 EP20100741318 申请日期 2010.02.15
申请人 MITSUBISHI PLASTICS, INC. 发明人 YOSHIDA, SHIGENOBU;OKAWARA, CHIHARU;OZEKI, KOTA
分类号 C23C14/08;B32B9/00;C23C14/56;C23C16/40;C23C16/54 主分类号 C23C14/08
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