摘要 |
PURPOSE: A probe card is provided to improve the productivity of a probe card manufacturing process by easily combing a probe with a guide member using the protrusion part of a probe. CONSTITUTION: A guide member(110) has a through hole(112) which accepts a probe(120) in a center area. The probe directly touches with the pad of a semiconductor device and transfers an electric signal. A connection part(130) is connected to the terminal(124) of the probe. The connection part is made of a conductive flexible material. An encapsulating material(140) protects the connection portion of the connection part and the terminal from an external impact.
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