| 摘要 |
<p>PURPOSE: A method for manufacturing a solar cell substrate is provided to optimally use the internal space of the vertical furnace including a processing chamber by including the configuration of a proper loading arrangement for a solar cell substrate. CONSTITUTION: A processing chamber(10) offers a space for processing a substrate. The centerl axis(11) of the processing chamber is materially matched with the center axis(2) of a vertical furnace(1). A loading arrangement(14) includes a plurality of arrays(16) of the solar cell substrate. The center point of the solar cell substrate is placed on an imaginary line which materially perpendiculars, is extended on the surface of the solar cell substrate. An opening(12) is placed in the first end(13) of the processing chamber.</p> |
