| 摘要 |
PURPOSE: A negative electrode structure for a rechargeable secondary battery, and a manufacturing method thereof are provided to prevent the cracking of the negative electrode structure by the change of the volume. CONSTITUTION: A manufacturing method of a negative electrode structure for a rechargeable secondary battery comprises the following steps: forming an oxidized layer(20) formed with SiO_2 on a silicon substrate(10); forming a cushion layer(30) on the oxidized layer with TiO_2; forming a current collector(40) on the cushion layer, with Pt; forming a negative electrode layer(50) with SnO_2 on the current collector; and heat processing all the layers in 480~520 deg C. |
