INSPECTION METHOD AND INSPECTION ASSISTING DEVICE OF QUARTZ PRODUCT IN SEMICONDUCTOR PROCESSING SYSTEM,申请号EP20040787657-传众专利搜索

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发明名称	INSPECTION METHOD AND INSPECTION ASSISTING DEVICE OF QUARTZ PRODUCT IN SEMICONDUCTOR PROCESSING SYSTEM
摘要
申请公布号	EP1693662(A4)	申请公布日期	2011.12.21
申请号	EP20040787657	申请日期	2004.09.06
申请人	TOKYO ELECTRON LIMITED	发明人	OIKAWA, MASAYUKI;ANBAI, KATSUHIKO;TAKAHASHI, NOBUHIRO;HAYASHI, TERUYUKI
分类号	G01N1/32;G01N27/62;G01N1/28;H01L21/00;H01L21/67;H01L21/673	主分类号	G01N1/32
代理机构		代理人
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