OSCILLATOR CIRCUIT, METHOD FOR MANUFACTURING OSCILLATOR CIRCUIT, INERTIAL SENSOR USING THE OSCILLATOR CIRCUIT, AND ELECTRONIC DEVICE

摘要

An oscillator circuit includes an oscillator, a filter that filters a monitoring signal output from the oscillator and outputs the filtered signal, a driver that amplifies the filtered signal to generate a driving signal, and a controller operable to control a passing characteristic of the filter based on the monitoring signal. The oscillator performs a vibration while being driven by the driving signal, and outputs the monitoring signal according to the vibration. This oscillator circuit allows the oscillator to vibrate stably.