发明名称 |
MANUFACTURING METHOD OF AN ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY |
摘要 |
PURPOSE: A method for array substrate for a liquid crystal display device is provided to minimize the amount of hydrogen peroxide in an etchant composition and control the concentration of the copper ion with in the etchant. CONSTITUTION: A gate electrode is formed in the top of a substrate. A gate insulating layer is formed in the top of the substrate. A semiconductor layer is formed on a gate isolation layer. A source/drain electrode is formed on a semiconductor layer. A pixel electrode is connected to the drain electrode. A etching solution composition includes ammonium oxalate 6~10 weight%, hydrogen peroxide 0.1~10 weight%, and the water of the remaining amount about the total weight of composition. |
申请公布号 |
KR20110136224(A) |
申请公布日期 |
2011.12.21 |
申请号 |
KR20100056088 |
申请日期 |
2010.06.14 |
申请人 |
DONGWOO FINE-CHEM CO., LTD. |
发明人 |
JUNG, KYUNG SUB;LEE, HYUN KYU;CHOI, KYUNG MI |
分类号 |
G02F1/136 |
主分类号 |
G02F1/136 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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