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发明名称
CHEMICAL-MECHANICAL POLISHING COMPOSITIONS AND METHODS OF MAKING AND USING THE SAME
摘要
申请公布号
EP2321378(A4)
申请公布日期
2011.12.21
申请号
EP20090813441
申请日期
2009.08.25
申请人
FERRO CORPORATION
发明人
KRAFT, BRADLEY, M.
分类号
C09K3/14;C09G1/02;H01L21/3105
主分类号
C09K3/14
代理机构
代理人
主权项
地址
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