Bolometer type terahertz wave detector

摘要

A bolometer type Terahertz wave detector comprises: a temperature detecting portion (14) having a thin bolometer film (7) formed on a substrate (2), a reflective film (3) that reflects Terahertz waves formed on the substrate (2) at a position facing the temperature detecting person (14), and an absorption film (11) formed on the top surface of part of an eave-like member (12) that extends to the inside from the perimeter edge section of the temperature detecting portion (14) and that absorbs Terahertz waves. The reflective film (3) and the absorption film (11) form an optical resonant structure. A thermal isolation structure is formed by a support portion (13) that supports the temperature detecting portion (14) such that it is separated from the substrate (2) by a gap. The eave-like member (12) is supported by the support portion (13) so that it is separated from the substrate (2) by a gap.