HIGH-SPEED AND HIGH-RESOLUTION ATOMIC FORCE MICROSCOPIC

摘要

PURPOSE: A high speed and high precise atomic force microscope is provided to bear a small measuring areas by the cantilever of a rapid speed and a large measuring area by a Z axis scanner. CONSTITUTION: A probe(16) is prepared to a cantilever(15). By the functional force between the atom of a probe and the atom of a sample surface, a vibration displacement is changed. Displacement measurement devices(19,20~24) examine the beam of a light source(20) to the cantilever. The displacement measuring device measured the displacement of the cantilever from the beam which is reflected by the cantilever. The scanning the sample, moving device(13,14) moves the cantilever and the displacement measuring device at the same time.