发明名称 |
Inspection apparatus and method for inspecting electric characteristics of devices formed on target object |
摘要 |
An inspection apparatus for inspecting electric characteristics of a plurality of devices formed on a target object includes a vertical drive mechanism for lifting and lowering a movable mounting table and a control unit for controlling the vertical drive mechanism. The vertical drive mechanism includes an elevation shaft connected to the mounting table and a servo motor for driving the elevation shaft to lift and lower the mounting table. Further, the control unit has a servo driver which includes a position control part for controlling a position of the servo motor, a torque control part for controlling a torque of the servo motor as a probe card is expanded or contracted by a change in temperature and a switching part for switching the position control part and the torque control part. |
申请公布号 |
US8081007(B2) |
申请公布日期 |
2011.12.20 |
申请号 |
US20080146081 |
申请日期 |
2008.06.25 |
申请人 |
YAMAMOTO YASUHITO;INOMATA ISAMU;TOKYO ELECTRON LIMITED |
发明人 |
YAMAMOTO YASUHITO;INOMATA ISAMU |
分类号 |
G01R31/00;G01R31/20 |
主分类号 |
G01R31/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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