A METHOD OF GENERATING A HOLE OR RECESS OR WELL IN A SUBSTRATE, A DEVICE FOR CARRYING OUT THE METHOD, AND A HIGH FREQUENCY HIGH VOLTAGE SOURCE FOR USE IN SUCH A DEVICE

摘要

The present invention relates to a method of generating a hole or recess or well in an electrically insulating or semiconducting substrate, and to a hole or recess or well in a substrate generated by this method. The invention also relates to an array of holes or recesses or wells in a substrate generated by the method. The invention also relates to a device for performing the method according to the present invention.