| 摘要 |
A vibrator has a large strength of a standing wave even with a low driving voltage, thereby improving the accuracy of component separation. A device according to the present invention includes a substrate having a channel groove provided in an upper surface of the substrate, a seal provided above the substrate so as to cover an upper opening of the channel groove, a projection provided on an outer side wall opposite to the channel groove, and a vibrator causing the projection to warp and vibrate in a depth direction of the channel groove. The warping vibration of the projection is amplified due to effect of leverage, and generates a large stress on the outer wall of the channel groove having the projection provided thereon. Consequently, the strength of a standing wave in the channel groove increases even for a low driving voltage, thereby improving the accuracy of component separation.
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