| 摘要 |
PURPOSE: A linear evaporation and deposition apparatus using plasma is provided to uniformly deposit organic materials on a substrate by injecting the linearly evaporated organic materials to the substrate. CONSTITUTION: A linear evaporation and deposition apparatus using plasma comprises a plasma generator(200), an evaporation unit(300), an injection unit, and a media gas supply unit. The plasma generator generates plasma discharged by a plasma source. The evaporation unit heats organic materials using the generated plasma and evaporates the organic materials. The injection unit injects the evaporated organic materials to a substrate. The medium gas supply unit supplies medium gas to the evaporation unit and discharges the organic materials evaporated in the evaporation unit to the injection unit. |
