WASTE AIR TREATMENT APPARATUS FOR LED PROCESS

摘要

PURPOSE: A used gas treating method for an LED manufacturing process is provided to decompose used gas twice, thereby effectively and quickly treating gas used in an LED manufacturing process. CONSTITUTION: A reaction chamber(110) treats used gas. A heater(120) is arranged in the reaction chamber. At least one baffle board(130) is arranged in the heater. The baffle board includes a flowing hole(131a) through which used gas flows. An air supply unit(140) is coupled with the reaction chamber to inject air to the reaction chamber.