发明名称 Fabricating method of polysilicon, Thin film transistor, and Organic light emitting display device
摘要 A method of forming a polycrystalline silicon layer, a thin film transistor (TFT), an organic light emitting diode (OLED) display device having the same, and methods of fabricating the same. The method of forming a polycrystalline silicon layer includes providing a substrate, forming a buffer layer on the substrate, forming an amorphous silicon layer on the buffer layer, forming a groove in the amorphous silicon layer, forming a capping layer on the amorphous silicon layer, forming a metal catalyst layer on the capping layer, and annealing the substrate and crystallizing the amorphous silicon layer into a polycrystalline silicon layer,
申请公布号 KR101094295(B1) 申请公布日期 2011.12.19
申请号 KR20090109835 申请日期 2009.11.13
申请人 发明人
分类号 H05B33/10;H01L29/786 主分类号 H05B33/10
代理机构 代理人
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