| 摘要 |
PURPOSE: A laser machining apparatus and a method for manufacturing multi-layered substrates is provided to minimize the movement of a beam irradiating unit or a stage unit since a line beam is irradiated at a fixed angle in a machine direction. CONSTITUTION: A laser machining apparatus comprises a laser source(10), a stage unit(50), a beam forming unit(30), and a beam irradiating unit(40). The laser source irradiates the laser beam. The stage unit moves in the X-Y directions. The beam forming unit optically forms laser beam to produce one-dimensional line beam. The beam irradiating unit irradiates one-dimensional line beam to firstly process a partial layer of a multi-layered substrate(100) on the stage unit, irradiates laser beam, and secondly processes the rest layers or a part of the multi-layered substrate. |
