| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric oscillation element, a piezoelectric oscillation unit, a piezoelectric oscillator and a frequency stabilization method, which can solve a problem of defect that a resonant frequency decreases with time lower than a target frequency in a piezoelectric device with a hermetically sealed structure in which a piezoelectric oscillation element is held in an insulation case using a silicon adhesive, due to silicon vapor component, emitted from the silicon adhesive, adhered and accumulated on a metal film of the piezoelectric oscillation element. <P>SOLUTION: A piezoelectric oscillation element held in a case by a conductive bonding member comprises a piezoelectric substrate 20 made of a thickness-shear piezoelectric material, and a material film 21 formed on the piezoelectric substrate. In the piezoelectric oscillation element, a metal film surface exposed in air is covered by a film 30 formed by chemical adsorption with a material having unbounded electron pair. <P>COPYRIGHT: (C)2012,JPO&INPIT |
