MEGASONIC WASHING METHOD AND WASHING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a megasonic washing method and a washing apparatus.

SOLUTION: A micro cavitation is formed in a space partitioned from a washing object by applying an electromotive force to a washing solution in megasonic as the megasonic washing method. Only stably oscillating microcavitations out of the formed microcavitations are moved to the space where the washing objects are loaded. In addition, the surfaces of the washing objects are washed using the stably oscillating microcavitations. The method can prevent patterns inside the washing objects from being damaged and effectively remove particles on the surfaces of the washing objects.

COPYRIGHT: (C)2012,JPO&INPIT