发明名称 METHOD FOR MANUFACTURING BURIED GATE USING PRE LANDING PLUG
摘要 A method for fabricating a semiconductor device is provided, the method includes forming a plug conductive layer over an entire surface of a substrate, etching the plug conductive layer to form landing plugs, etching the substrate between the landing plugs to form a trench, forming a gate insulation layer over a surface of the trench and forming a buried gate partially filling the trench over the gate insulation layer.
申请公布号 KR101094373(B1) 申请公布日期 2011.12.15
申请号 KR20090060879 申请日期 2009.07.03
申请人 发明人
分类号 H01L21/336;H01L21/768;H01L29/78 主分类号 H01L21/336
代理机构 代理人
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