发明名称 |
METALL-ORGANISCHE NIOBIUM- UND VANADIUM-VORLÄUFER ZUR DÜNNSCHICHTABLAGERUNG |
摘要 |
Compounds of the formula Cp(R 1 ) m M(NR 2 2 ) 2 (=NR 3 ) (I):
Wherein:
M is a metal independently selected from Vanadium (V) or Niobium (Nb) and m ‰¤ 5;
R 1 is an organic ligand, each one independently selected in the group consisting of H, linear or branched hydrocarbyl radical comprising from 1 to 6 carbon atom;
R 2 is an organic ligand, each one independently selected in the group consisting of H, linear or branched hydrocarbyl radical comprising from 1 to 6 carbon atom;
R 3 is an organic ligand selected in the group consisting of H, linear or branched hydrocarbyl radical comprising from 1 to 6 carbon atom.
The compounds are used as metal precursors for ALD and CVD processes. |
申请公布号 |
AT535534(T) |
申请公布日期 |
2011.12.15 |
申请号 |
AT20080305649T |
申请日期 |
2008.10.07 |
申请人 |
L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE |
发明人 |
BLASCO, NICOLAS;CORREIA - ANACLETO, ANTONY;PINCHART, AUDREY;ZAUNER, ANDREAS |
分类号 |
C07F9/00;C23C16/18 |
主分类号 |
C07F9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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