| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a target supply device in which speed of a droplet target after acceleration can be maintained to be constant when the droplet target injected from a nozzle is accelerated. <P>SOLUTION: The target supply device includes: a target nozzle 1 which injects drop-like or solid granular target substance; a charge supply device 3 which charges the drop-like or solid granular target substance; a charging amount monitor 4 and a charging amount measuring part 7, which measure the charging amount of target substance charged by the charge supply device; a charging amount control part 8 which feedback-controls the charge supply device on the basis of a measurement result of the charge amount measuring device 7; and an accelerator 5 which accelerates the charged target substance. <P>COPYRIGHT: (C)2012,JPO&INPIT |
