| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a photo-acoustic gas detector. <P>SOLUTION: A photo-acoustic gas detector comprises: an infrared source; an infrared filter; and a acoustic sensor. The infrared source, the filter, and the acoustic sensor can be integrated on one or more semiconductor substrates such as silicon. A processing circuit can also be integrated on a substrate. Moreover, the infrared source, the filter, and the acoustic sensor can be integrated into single component packages, such as a metal can transistor package. <P>COPYRIGHT: (C)2012,JPO&INPIT |
