SUBSTRATE MOUNTING ELECTROACOUSTIC CONVERSION ELEMENT, MICROPHONE UNIT, AND METHOD OF MANUFACTURING THEM

摘要

PROBLEM TO BE SOLVED: To provide a substrate mounting an electroacoustic conversion element in which a possibility that the electroacoustic conversion element fails due to dust can be reduced.

SOLUTION: A substrate 12 mounting an electroacoustic conversion element has an opening 121 formed on a mounting surface 12a on which an electroacoustic conversion element 11 converting a sound signal into an electric signal is mounted, and covered by the electroacoustic conversion element 11. At least a part of a wall surface 122a of a space 122 in the substrate connecting with the opening 121 is treated with a coating (a coating layer CL is formed).

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