| 摘要 |
A microfluidic device including a microvalve includes a first substrate, a second substrate facing the first substrate, an elastic film between the first and second substrates, a microfluidic channel on the second substrate, a valve seat of the second substrate protruding in the microfluidic channel, and a fine structure on a surface of the elastic film, facing the valve seat and which contacts the valve seat when the microvalve is operated.
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