发明名称 |
OZONE PLENUM AS UV SHUTTER OR TUNABLE UV FILTER FOR CLEANING SEMICONDUCTOR SUBSTRATES |
摘要 |
A quartz window with an interior plenum is operable as a shutter or UV filter in a degas chamber by supplying the plenum with an ozone-containing gas. Pressure in the plenum can be adjusted to block UV light transmission into the degas chamber or adjust transmittance of UV light through the window. When the plenum is evacuated, the plenum allows maximum transmission of UV light into the degas chamber.
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申请公布号 |
US2011306213(A1) |
申请公布日期 |
2011.12.15 |
申请号 |
US20100797196 |
申请日期 |
2010.06.09 |
申请人 |
WANG YEN-KUN VICTOR;CHOU SHANG-I;AUGUSTINO JASON;LAM RESEARCH CORPORATION |
发明人 |
WANG YEN-KUN VICTOR;CHOU SHANG-I;AUGUSTINO JASON |
分类号 |
H01L21/465;B32B3/26;B32B17/00;C03B23/20 |
主分类号 |
H01L21/465 |
代理机构 |
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主权项 |
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