MEASUREMENT MEMBER, STAGE DEVICE, EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING DEVICE

摘要

Disclosed is a measurement member which is used for an exposure apparatus wherein a substrate is exposed to exposure light through a liquid. The measurement member comprises: a base that is capable of transmitting the exposure light; a conductive light-blocking film that is formed on the base and defines an opening into which the exposure light can enter through the liquid; and a conductive member that is connected to at least a part of the light-blocking film for the purpose of grounding the light-blocking film.