METHOD OF MANUFACTURING OXIDE SUPERCONDUCTOR THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing an oxide superconductor thin film which can realize a high-Ic thick film with a highly reproducible high-Ic value.

SOLUTION: An oxide superconductor thin film for a superconducting wire is manufactured by the following method with metal organic deposition using fluorine-free metal organic compounds. Pre-annealing is performed in a steam-containing atmosphere for pyrolysis of organic constituents of metal organic compounds. Furthermore, before annealing heat treatment for crystallization heat treatment, intermediate heat treatment is given for pyrolysis of carbonates contained in the thin film to which the annealing heat treatment is given. The intermediate heat treatment is given in temperature range of 650-720°C for 10-180 minutes. The thickness of the oxide superconductor thin film is 0.3-5 μm.

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