发明名称 MEMS DEVICE AND PROCESS
摘要 A micro-electrical-mechanical system (MEMS) transducer comprises a layer of dielectric material having an electrode formed in the layer of dielectric material. A region of the layer of the dielectric material is adapted to provide a leakage path which, in use, removes unwanted charge from the layer of dielectric material.
申请公布号 US2011303994(A1) 申请公布日期 2011.12.15
申请号 US201013201093 申请日期 2010.02.12
申请人 JENKINS COLIN ROBERT;HOEKSTRA TSJERK HANS;LAMING RICHARD IAN 发明人 JENKINS COLIN ROBERT;HOEKSTRA TSJERK HANS;LAMING RICHARD IAN
分类号 H01L29/84;H01L21/28 主分类号 H01L29/84
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