发明名称 VERFAHREN ZUR HERSTELLUNG VON POLYSILIZIUMFILMEN
摘要 <p>The invention relates to a method of fabricating at least one polycrystalline silicon plate (68, 70) with one (64, 66) of its two faces presenting predetermined relief, in which method a layer of polycrystalline silicon (60, 62) is deposited on at least one (56, 58) of the two faces of a support (50). The method comprises the steps of embossing said face (52, 54) of the support (50) to impart thereto a shape that is complementary to said relief; depositing said polycrystalline silicon layer (60, 62) on said embossed face (56, 58) of the support (50), the surface (64 or 66) of said polycrystalline silicon layer situated in contact with said embossed face (56 or 58) then taking on the shape of said relief; and eliminating said support in order to obtain said polycrystalline silicon plate (68 or 70). The invention is applicable to fabricating solar cells.</p>
申请公布号 AT535023(T) 申请公布日期 2011.12.15
申请号 AT20050739553T 申请日期 2005.03.18
申请人 SOLARFORCE 发明人 REMY, CLAUDE;BELOUET, CHRISTIAN
分类号 H01L31/0236;C30B15/24;H01L31/18 主分类号 H01L31/0236
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