| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coated member that has a DLC (diamond like carbon) film exhibiting high adhesion to a substrate, thereby expanding the range of material choices of the substrate. <P>SOLUTION: The coated member 100 includes the substrate 200, an intermediate layer 300 coating a surface of the substrate 200 and the DLC film 400 coating a surface of the intermediate layer 300. The temperature of the substrate 200 is kept at ≤300°C while the intermediate layer 300 and the DLC film 400 are formed. The intermediate layer 300 includes a metal nitride. The ratio of the Young's modulus E3 to the hardness H3 in the intermediate layer 300 is larger than the ratio of the Young's modulus E2 to the hardness H2 in the substrate 200 but smaller than the ratio of the Young's modulus E4 to the hardness H4 in the DLC film 400. <P>COPYRIGHT: (C)2012,JPO&INPIT |
