| 摘要 |
A rotary encoder 100 includes a scale 201 that includes a spiral pattern 501 and a radial pattern 502 to be rotatable around a rotation axis, a first sensor unit 301 that detects a light transmitted through the spiral pattern 501 to output a first detection signal, a second sensor unit 302 that detects a light transmitted through the radial pattern 502 to output a second detection signal, and a signal processing circuit 401 that generates an eccentricity correction signal based on the first detection signal to correct the second detection signal based on the eccentricity correction signal. The spiral pattern 501 detects a rotational angular displacement larger than a predetermined value, and the radial pattern 502 detects a rotational angular displacement smaller than the rotational angular displacement detected by the spiral pattern 501. |
