| 摘要 |
<p>Disclosed are an apparatus for manufacturing solar cells and a method for manufacturing solar cells with high productivity and low cost. The apparatus for manufacturing solar cells is provided with: a load lock chamber (2) having a substrate (S) carried thereinto and therefrom by performing switching between an ambient atmosphere and a vacuum atmosphere; a processing chamber (4) wherein impurity ions for forming a pn junction are introduced, in the vacuum atmosphere, into the substrate (S) for a solar cell; and a transfer chamber (1) having a built-in transfer means (6), which transfers the substrate (S) between the load lock chamber (2) and the processing chamber (4). The impurity ions are introduced by radiating the impurity ions from an ion gun (5), and the ion gun (5) is provided such that the grid panel (52), i.e., the ion radiation surface of the ion gun, faces the substrate (S) transferred to the processing chamber (4).</p> |
