INERTIAL MICRO ELECTROMECHANICAL SENSOR AND MANUFACTURING METHOD THEREOF

摘要

An inertial micro electromechanical sensor and a manufacturing method thereof are provided. The inertial micro electromechanical sensor includes a main body (10) and a mass block (200) which can move relatively to each other. The main body (10) includes a first main body (100) with a first surface (100a) and a second main body (300) which is perpendicular to and connected with the first surface. A first electrode (110) in the first main body (100) is parallel to the first surface (100a), and a second electrode (310) in the second main body (300) is perpendicular to the first surface (100a). The mass block (200) is suspended in the space formed by the second and first main body. The mass block (200) includes a third electrode (211) parallel to and relative to the first surface (100a), a fourth electrode (231) perpendicular to the first surface (100a), and a mass layer (233). The third electrode (211) and the fourth electrode (231) are connected and form a U-shaped groove. The mass layer (233) is filled in the U-shaped groove. The mass of the inertial mass block can be effectively increased, the precision of the micro electromechanical sensor can be improved, and the manufacturing cost can be reduced.