| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide thermal treatment apparatus and method for oxide superconductive thin film wire rod that can easily control introduction of a proper amount of oxygen to an oxide superconductive thin film wire rod obtained by forming RE123 superconductive thin film on a substrate, and stably manufacture an oxide superconductive thin film wire rod having high Tc and Ic. <P>SOLUTION: A thermal treatment apparatus for an oxide superconductive thin film wire rod includes an oxygen thermal treatment chamber having a heater for heating a target to a predetermined temperature and an extending mechanism for extending a tape-like oxide superconductive thin film wire rod wound around a reel, a cooling chamber with a cooling mechanism in which the oxide superconductive thin film wire rod extended from the oxygen thermal treatment chamber is brought into contact with a cooling member cooled by refrigerant to cool the oxide superconductive thin film wire rod, and a take-up chamber with a mechanism for taking up the cooled oxide superconductive thin film wire rod around a reel. A thermal treatment method for an oxide superconductive thin film wire rod uses the thermal treatment apparatus. <P>COPYRIGHT: (C)2012,JPO&INPIT |
